Facilities

Micro-Electro-Mechanical Systems (MEMS)
Fabrication Facilities	Characterization Facilities
Clean Room Deep Reactive Ion Etching (DRIE) Plasma Enhanced Chemical Vapor Deposition (PECVD) Lithography Facility Pulsed Laser Deposition (PLD) RF Sputtering Electro-Deposition Excimer Laser Critical Point Drier	Wafer Geometry Gauge Optical Profiler Four Point Probe Semiconductor Parameter Analyzer Spectrum Analyzer Spectrophotometer Stylus Surface Profiler Spray Coater
Materials
Fabrication and Processing Facilities	Characterization Facilities
RITSCH High Energy Ball Mill (Controlled Milling) Turbula Mixer Controlled Environment Glove Box Sintering Furnace (1200C) Heat Treatment Furnaces ISOMET Precision Cutting Furnaces Complete Sample Preparation Equipment Hydraulic Presses (up to 100 Ton) Rolling Machines LINDBURG Programmable Melting Furnace	Perkins Elmer Differential Scanning Calorimeter (DSC) LICKA Optical Microscope with Image Capture and Analysis System MTS Hydraulic Universe Testing Machine (50 Tons) INSTON Screw Drive Universal Testing Machine (50 KN) with heating furnace (800C) Mettatoya Vickers Microhardness Tester Rockwell and Brinell Hardness Testers Mettlers Digital Densitometer High Sensitivity Balances
Biotechnology
Biotechnology Facilities
Realtime PCR Plate Reader (Fluorescence, UV, Vis) Protein and DNA Electrophoresis units Thermo-cyclers Western blot	High Speed Centrifuge Super Speed Centrifuge Incubator Shaker Millipore Direct Q Water Spectrophotometer PCR System 9700
Surface Chemistry
BETASP 2020 Chemisorb 2750 Hydrosorb 1000 Mercury Porosimeter Poremaster G60
Environmental
Environmental Engineering Laboratory
Generic Characterization Facilities
LEO Field Emission Scanning Electron Microscope (1nm resolution) Energy Dispersive Spectroscopy Electron Back Scattered Diffractometer MTS XP Nanohardness Tester Vecco Atomic Force Microscope